durusmail: mems-talk: PEG coating
PEG coating
2004-11-30
PEG coating
haixinzhu
2004-11-30
Hello,

I am trying to coat less than 100um thick PEG 8000 (heated first) onto an area
of about 150um by 2mm. Spin coating is impossible for this material since it
gets to solid very soon. IS there anyone who has experience in coating this
material on device? and any suggestions?


Thanks a lot

Michael
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