durusmail: mems-talk: Elevated temperature acetone bath for metallic liftoffprocess
Elevated temperature acetone bath for metallic liftoffprocess
Elevated temperature acetone bath for metallic liftoffprocess
BobHendu@aol.com
2004-12-16
Thomas:

I personally wouldn't recommed heated acetone due to the low flash point. If
your aluminum lines are lifting off I would suggest you check your deposition
system first. If you are depositing on silicon or silicon dioxide you might try
a sputter etch prior to deposition if you are sputtering or an oxygen ash
followed by a mild 10:1 HF dip for 20 seconds followed by an alcohol vapor dry
if you are evaporating. Bob Henderson

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