Pawel,

I use a Tencor Alpha-step 200.  I make all of my thickness measurements with it.
Tencor
no longer supports this tool.  The oldest one they support is the Alpha-step
500.  What
type of PC controlling are you trying to use with it?

Brent

Pawel Janus wrote:

> Hello everyone,
>
> Does anyone use profilometer for film thickness measurement  Tencor Alpha-step
200 ?
> Is there some kind of PC control software for this device?
>
> Pawel Janus
>
> Pawel Janus
> Institute of Electron Technology
> al. Lotnikow 32/46
> 02-669 Warsaw
> Poland
>
> tel. +48 22 716 59 90
> fax. +48 22 716 59 91
>
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