David You might look into MgF2, CaF2, and perhaps even SiO, depending on thickness. Check out www.lesker.com for information on possible deposition methods. For example, MgF2 is available in sputtering sources. http://www.lesker.com/newweb/Deposition/Sputter_Targets/ElementNames_J_P/Ma_ magnesiumFluoride.cfm?CFID=581512&CFTOKEN=28963401§ion=magcomps&init=ski p David Nemeth Senior Engineer Sophia Wireless, Inc. 14225-C Sullyfield Circle Chantilly, VA Cell: (202) 288-1067 Ph: (703) 961-9573 x206 Fax:(703) 961-9576 -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]On Behalf Of X.Guo Sent: Saturday, January 01, 2005 10:30 PM To: mems-talk Subject: [mems-talk] looking for any materials transparent to excimer laser Dear all, Happy the new year! Does someone know any materials easy to deposit that is transparent to the excimer laser (such as KrF)? Thank you very much Regards, Xiaojun _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/