This may also be ammonium precipitates. See this link:

http://www.semiconductorfabtech.com/journals/edition.08/download/08.135.
pdf

Regards,
Pierre x286

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Sarah Higgins
Sent: January 5, 2005 10:09
To: mems-talk@memsnet.org
Subject: [mems-talk] pink residue film after TiW etching on alumina

The pink film you are seeing is probably gold. It is very common to see
this with this metal system.  It typaclly appears when you heat treat
the the finished substrate.  It can easily be removed using a chemical
etchant.  A dillute Iodine/Potassium Iodine mixture at room temperature
should remove it almost instantly.  A quick dip & rinse should take care
of it.

Sarah Higgins
Palo Alto, CA
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