Hi, Heng,
If Sylgard 184 is the PDMS you referred, I do not think it will reach submicron.
The curing agent is round 10um that have been discussed at this group. For my
experience, you will see very rough surface, i.e., lots of dots, when you spin
coating the film thinner than 10 um.
If you active the PDMS surface, e.g. O2 plasma etching, it is very easy to joint
two PDMS layer.
Good luck,
Lydia
Quoting Xin Heng :
> Hi,
> I have two questions on microfluidic devices. I hope someones here can
> give me some hints. Thanks
> 1) I was thinking of binding a PDMS layer and a PMMA layer by simply
> attaching them together and 80C baking for a couple hours. But there seems
> to be some bubbles always when I tried using electrokinetics to rive the
> flow
> 2) Alternatively I am thinking of attaching two PDMS layers together.
> But in this case, I might require one PDMS layer to be submicron thick,
> say, 300nm. Is this goal achievable with conventional spin coating
> techniques?
>
>
> > Best Wishes,
>
> Xin Heng
> Electrical Engineering of Caltech
> M/C136-93, 1200 E California Blvd
> Pasadena, CA, 91125, U.S.A
>
> office(Moore 337):1-626-395-8870
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