Hi,

Now we are developing a structure, using Ni(structural layer) and Cu
(sacrificial layer). We want to find a good etchant for Cu, but not
attacking Ni or permalloy.

So could anyone give me some information about that?

Thanks a lot!

Jun Zou


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Jun Zou
209 E.Clark Street Apt#2
Champaign, IL 61820
USA
Tel:(217)-265-0808(O) (217)-351-7448(H)
E-mail: junzou@uiuc.edu
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