John, The primary problem involved with the existence of the buried oxide (BOX) when it comes to anodic bonding is that, in the standard configuration (i.e. "silicon" on heated grounding surface, Pyrex on top, negative potential provided via non-grounded top heating surface - the setup used for an EVG520), the BOX becomes a resistor in the DC circuit from negative potential to ground. This will prevent the flow of current, and likewise the flow of Na ions, in the Pyrex, which is the true driving force of an anodic bond. The best way to defeat this is if you can get a direct grounding contact to the bonding layer of silicon. With regards to the released structures, your best bet is to pattern the glass with cavities that correspond to the structures. Otherwise, the electrostatic force may cause these structures to bow upward and bond with the glass. Best Regards, Chad Brubaker EV Group invent * innovate * implement Technology - Tel: 480.727.9635, Fax: 480.727.9700 e-mail: c.brubaker@EVGroup.com, www.EVGroup.com