durusmail: mems-talk: Simulator for wet etching
Simulator for wet etching
2005-02-07
2005-02-08
2005-02-17
Simulator for wet etching
Yi Yao
2005-02-07
Hi all,

Any recommendation for wet etch simulators (academic use)? I'll do
some research on wet etch simulation and modeling, espeically on
copper wet etching.
Is there any groups working on this?

Any general infomation and suggestions are greatly appreciated!

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