Hi Dear all,

I am trying to make cantilevers that can be used in AFM(Atomic Force
Microscope), and silicon cantilever is one of my object.  Using SOI
wafer is the mostly common and simple way to achieve that, however,
the expense is high.  Does someone know any other method to fabricate
silicon cantilevers?  Any related papers?  It will be very kind of you
to help me.

Best regards.

Duan