Hi,
Could someone give me some information on limits of electroplating in MEMS
devices. How thin layers can be deposited ? Can electroplating be used to
put thim metal coatings on surfaces which are 'invisible' from the ouside
(e.g. encapsulated microchannels) ?
Thanks on foerhand for your replies !
Wouter

Wouter van der Wijngaart
Kungl. Tekniska Högskolan       Tel:    +46 - (0)8 - 790 66 13
S3, Elektrisk mätteknik Fax:    +46 - (0)8 - 10 08 58
100 44  Stockholm               Minicall:       +46 - (0)740 - 26 71 28
Sweden                  e-mail: wouter@s3.kth.se
http://www.s3.kth.se/instrlab/staff/wouterw.html