Dear Colleagues,

Some references tell that one can make a bond between two pieces of PDMS by
exposing to air plasma, but there are no details. Can you help me find the
answers of the one or all of the following questions?

1. What is the mean of air plasma? Is it kind of O2 or Ar plasma sputtering?
Can it be done in RIE?
2. What gas type and flow, RF power, and treat time?
3. Should I apply some pressure on the PDMS sheets at the bonding?

Thank you very much for your help,

Hongjun Zeng, PhD