durusmail: mems-talk: how to protect viton o-ring from plasma?
the problem of etchnig Cr/Cu
2005-03-18
2005-03-18
how to protect viton o-ring from plasma?
2005-03-20
how to protect viton o-ring from plasma?
Andrew Xiang
2005-03-20
Hi, folks,
I think the plasma is eating into the viton o-ring inside the vacuum
chamber? What can I do to avoid that? dc plasma 300W, 15pascal pressure.

thanks
Andrew

reply