durusmail: mems-talk: unexpected electorplating
Reliability of Ti-Au metal stack
TaN etching
2005-03-09
unexpected electorplating
2005-03-23
unexpected electorplating
Suk Sang Chang
2005-03-23
Hi doing.
 We are making the mask for Deep X-ray lithography.
Whenever we try to electroplate the gold on the Si substrate with seed layer
Au/Cr. It appears the phenomenon to permeate into the bottom, to plate on
bottom and to raise the PR.
Could you give me some suggestions on how to solve this problem?
Then I really appreciate that.

Suk Sang Chang
sschang@postech.ac.kr
POSTECH/PAL
Korea





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