durusmail: mems-talk: Cracks in glass wafer during anodic bonding
Cracks in glass wafer during anodic bonding
Cracks in glass wafer during anodic bonding
Shane Arthur McColman
2005-03-23
Hi Andreas,

I've had the same problem and found that going to a lower bonding voltage
seemed to reduce the effect.  Although it is a lot slower.

--
Shane McColman
Research Professional
NanoFab, University of Alberta
W 1-028 ECERF Building
Edmonton AB, Canada, T6G 2V4

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