Dear all,

    I am a beginner in ansys. I am doing a piezoresistive pressure
sensor with 4 resistors above the diaphragm so that a Wheatstone
bridge is formed.I have several questions to ask, I'll be grateful if
you can help me.

   I have found a similar topic in mems-talk archive. in the ansys
help documentation, there is a sample of piezoresistive analysis using
plane223 to analyse a piezoresistive four-terminal sensing element .


 How can i do a analysis to calculate the voltage output using 223,226
or 227 element type. Can anyone give me some suggestions!

Thanks a lot!


    Simplified graph of the pressure sensor
                [11-0]
|---------------------------------------
|                   |                   |
|                                       |
|                                       |
|                                       |
|  |                                 |  |   [110]
|                                       |
|                                       |
|                                       |
|                  |                    |
|---------------------------------------|

n type (100) silicon
Boron implantation
p-type piezoresistor
square diaphragm
--
sincerely,
Daven Zhou