durusmail: mems-talk: Silicon etching
Silicon etching
2005-05-09
2005-05-09
2005-05-10
2005-05-10
2005-05-10
2005-05-10
Silicon etching
Nik Dee
2005-05-09
Hi guys, I have tried to use Chlorobenzene to liftoff S1813 on a silicon wafer.
It looks like there is some rection between the Chlorobenzene and the silicon
and the features of the S1813 are destroyed.
Does anyone know how to get around this?

Nik Dee

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