Hello,

I'm trying to anisotropically etch lithium niobate using an ICP etching
tool.I've tried it with chromium and titanium masks but both are stripped
away when I tried etching with the use of CH4 and Ar gas mixture.The
etch profile looks good but I'm looking for an etch depth of around
4microns and these etch masks do not hold till its etched that deep.
If any of you have experience working or have any idea please pass it on
to me.

Thanks,
Krishna