durusmail: mems-talk: Cr as resistor
Cr as resistor
Cr as resistor
Behraad Bahreyni
2005-05-10
Hi Mrs. Daneshmond,

   We have been using Cr for resistive heating purposes quite a lot. We
have also used it to take advantage of the large internal stress in Cr
films. In your case, Ti should work, too (and you can use it as the
adhesion layer for gold). Besides these, you may use Nickel or sputtered
doped silicon.
   Getting a high resistance vale should not be too difficult, as you
can deposit relatively thin films (a few hundred nanometers) and pattern
narrow lines (I am assuming that you need only a few milliamps of
current). Moreover, since you want to use the resistor for biasing
purposes, it may be helpful to make a long spiral resistor, as it will
introduce some inductance, too. The stray inductance could be a used for
RF isolation of the input and output terminals.

   Good luck,
   Behraad

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Hi Shay,
Thanks a lot for the reply. But what if I don't need precise and
consistent resistor?
I only need a big resistor; let say more that 200ohm but it doesn't
matter how big?? and also I don't need to know the value?
do you think it might work??
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