durusmail: mems-talk: Through holes etching - aspect ratio > 20
Through holes etching - aspect ratio > 20
2005-05-22
2005-05-23
Through holes etching - aspect ratio > 20
Pradeep Dixit
2005-05-22
Dear All,

Has any one achieved 15-20 microns "through holes" in 400-450 thick
wafer. Aspect ratio > 20 ?

Please let me know if any one has got success in it.
--
Thanks,
Pradeep Dixit
reply