durusmail: mems-talk: Bio-MEMS FAbriaction
Bio-MEMS FAbriaction
Bio-MEMS FAbriaction
srikar chowdary paruchuri
2005-05-23
Hi All,
I am new to MEMS-Talk.
Can some one help me or suggest me the techniques available for bonding a
silicon wafer with pyrex glass.(Ex. Anodic Bonding...) I would like to the
techniques which can be implemented for less total cost for bonding.
I would like to know about different materials available to fabricate
Bio-MEMS devices.

Srikar

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