durusmail: mems-talk: Cleaning Microfluidic Devices (SU8-2000 on Glass)
Cleaning Microfluidic Devices (SU8-2000 on Glass)
2005-05-23
Cleaning Microfluidic Devices (SU8-2000 on Glass)
Avinash Kane
2005-05-23
Hello,

I am currently fabricating microfluidic devices in SU8-2000.
I am interested in knowing how other users are cleaning their devices after
fabrication.
This will help to prevent clogging when reagents are pumped through the
devices.

My device substrate is glass. I am not currently hardbaking my wafers.
I'm wondering if there are chemicals that can aggressively clean my wafers
without
harming my SU8 patterns.

Thanks very much,

Avinash Kane
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