Introduction to MICROELECTROMECHANICAL SYSTEMS (MEMS) and the MULTIUSERS MEMS
                         PROCESSES (MUMPS) ACTIVITIES

             A Case Western Reserve University - MCNC short course

                              June 14 - 16, 1995
                                     MCNC
                          Research Triangle Park, NC

Recent progress in microactuators is transforming the conventional field of
solid-state transducers (or sensors and actuators) into what is becoming known
as microelectromechanical systems (MEMS). In the most general form, MEMS
consist of mechanical microstructures, microsensors, microactuators and
electronics integrated in the same environment (i.e. on a silicon chip).
Miniaturization of mechanical systems promises unique opportunities for new
directions of scientific and technological progress. MEMS are not only about
miniaturization of mechanical systems; they are also a new paradigm for
designing mechanical devices and systems. The microfabrication technology
enables fabrication of large arrays of devices, which individually perform
simple tasks but in combination can accomplish complicated functions.

This MEMS short course provides an overview of MEMS technology with an emphasis
on how to make use of the multi-user MEMS processes (MUMPs) program a MCNC,
which is funded by the Advanced Research Projects Agency (ARPA). The MUMPs
program exists to provide low-cost, easy access to MEMS technology for all
domestic organizations (academic, industrial and government) and currently
features a three-layer polysilicon surface micromachining process. Attendees at
this course will have ample time to participate in the next MUMPs run. The
course is designed to give the participant a broad overview of the MEMS field
(sensors, actuators, and the related fabrication processes) as well as in-depth
coverage of the technology and methodology available through MUMPs. Hands-on
training on Tanner ResearchUs L-Edit layout tools will also be featured.

Who Should Attend

This short course has been developed for engineers and scientists from all
disciplines who are interested in gaining an understanding of the design,
fabrication and characterization of sensors, actuators, and microsystems. The
content is tailored to provide participants with the basic knowledge necessary
to start designing MEMS and participate in the MUMPs activities. The workshop
is design for engineering professionals as well as academic faculty members and
graduate students interested in learning about the capabilities and potential
of MEMS.

Topics to be covered include:
    Introduction to Microfabrication and Micromachining
    Microsystems (Including Packaging and Integration
    Microsensors and Microactuators
    Surface, bulk and LIGA Micromachining
    Materials Aspects
    Common processes
    Device examples
    Testing of MEMS
    Layout editor (L-edit) training
    Standard cell library for MEMS
    MUMPs Processes and Design
    Hands-on design and layout exercises

The price of this 3-day class is $975 per person. This fee covers all hands-on
activities, a comprehensive set of course notes, continental breakfast, lunch
and breaks each day, a reception on Wednesday evening and a copy of the CaMEL
standard element library software.

For more information please contact

Jason Hoch
MCNC
919) 248-1983 jhoch@mcnc.org