dear  all
        i am aM Tech student and am  working on simulating flow sensor in
intelisuite software.
here i need to utilise boron doped polysilicon as sensor as well as
heater. the boron concentration is 2e19 for heater and 2e18 for the
sensors.
        please tell me about doping a polysilicon layer? i am able to
deposit poly layer on Si3N4 but not able to get it doped?
  how can i change the material properties?

thanks and regards
abhay c deshpande