Lee,

I can't tell you much more about the tool I used. It was simply called a
UV/ozone cleaner and I don't remember the brand. Looked like a large bread
box. Basically just a UV light and a tray. The UV generates the ozone. No
optical filters or anything like that. Basically (I'm theorizing) it just
breaks some of the surface chemical bonds with the ozone. The lamp puts
out a lot of heat though so going more than a minute or two tends to
plasticize the PDMS and then it won't bond at all.

Here's a link to something very much like what I used:
http://www.equiptechonline.com/subsection.cfm?sid=4&subID=92

Mike