Could any one give some tips on using ProTEK from Brewer Science? I am depositing it on TEOS and on nitride. I get pin holes in it and TMAH gets into them and etches the wafer. Also, sometimes it peels off. I'd very much appreciate advice. Thanks, Elena ---- Original message ---- >From: "Joe Lonjin">Subject: RE: [mems-talk] Any metal as KOH masking layer? > >Why metal? Use Nitride or get Protek from Brewer Science.