Hello all, (Sorry to resend the same question but there was some problem with micron and temperature symbols...) I have to spin-coat 1 micron (or a little more) thick layer of AZ 5214E resist on silicon sample. I now know about the relation "thickness/rotation velocity" (thank you for that). Does someone know about the spin time (is 45sec ok?) and the post softbake time and temperature (115 Celsius degree/30sec?). Thank you