When trying to get things to stick to cured SU8, I found that a brief
plasma treatment of the surface helps a lot with adhesion. About one
minute of oxygen plasma around 100 watts should do the job, but you can
experiment with the exact time and power to get the best results.

good luck,
Joe Grogan

ZHIZHONG YIN wrote:

>Hi, all,
>
>I have the following process flow, is it doable?
>
>1. deposit a metal layer on substrate.
>2. spin-coat a SU-8 layer on metal and develop the SU-8 to make contact hole
for the metal layer.
>3. spin-coat a positive resist layer on SU-8 and develop by using the inverted
mask of the previous one, so that the contact hole go through the two resist
layer at the same place.
>4. deposit another metal layer on the positive resist layer
>5. lift-off the positive resist layer and have the second metal contact with
the first metal layer at the through hole. the first metal is otherwise
protected by the SU-8 layer.
>
>Can the positive resist layer stick to the SU-8 layer?
>
>Any suggestion is welcome. Thanks a lot.
>
>Zhizhong
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