durusmail: mems-talk: Re: Corning Micromachining
Re: Corning Micromachining
1998-05-06
Re: Corning Micromachining
Seo,Jee-Hune
1998-05-06
Hi.. Aizpurua



I am M.S. student of Microsystems Lab. Ajou Univ. in KOREA.

We use Patterning of electrode on Pyrex #7740. and it use  Anodic

bonding. it use cap of silicon structure.(e.g. Accelerometer, Micropump,

actuator, Mass spectrometer, etc.)




Aizpurua, Mikel ÀÛ¼ºÇÔ:

>         Hi Everyone
>
>         I am interested in finding out a way of how to micromachine Corning
> 7740.
>
>         Thank you in advanced
>
>         Mikel Aizpurua
>
>
>
>


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