Ferro produces doping pastes for photovoltaic applications. These are relatively easy to use and the only equipment you need is an RTA system. However, I am not sure if you can use these pastes for more than ~0.5um of doping depth. You can check with them (http://www.ferro.com). Good Luck, BB >> ------------------------------------------------------------------------ >> >> >> Dear Yu Chen, >> >> >> Hello, there are several ways to dope, ion implant, boron solution or >> spin-on boron, planar source, Boron gas in the diffusion tube etc. >> >> It seems the easiest is for you to use a boron solution that can be spun >> on, brushed on or dip coated. These types of solutions can be obtained >> from ; >> Filmtronics >> Butler, Pa. >> >> Tel 724 352 3790 >> Fax 724 352 1772 >> >> They have several solutions that can work fine, let them know the >> approximate concentration of dopant needed and the temperature you wish >> to diffuse at or use RTP. >> >> Hope this helps, if you have any questions please ask. >> Sincerely, Neal >> >> >> >> At 01:45 PM 6/24/2005 -0400, you wrote: >> > >>>> I want to build a simple setup of boron doping system. >>>> It is going to be used to dope small silicon wafer(2mm*2mm), 1 micron >>>> doping >>>> depth is enough. >>>> is there any reference I can consult to do this job? >>>> any suggestion is welcome >>>> >>>> best >>>> >>>> Yu Chen > -- Behraad Bahreyni Microfabrication Research Laboratory, Department of ECE The University of Manitoba 15 Gillson St., Winnipeg, MB, Canada R3T 5V6 Email: Behraad@ieee.org Fax: +1-(204)-261 4639