durusmail: mems-talk: necessary thermsich energy for excition of membrane resonator
necessary thermsich energy for excition of membrane resonator
2005-06-29
necessary thermsich energy for excition of membrane resonator
yanli Wang
2005-06-29
Hallo everyone,

 I have a oxide/nitride membrane resonator fabricated. I have tried to
excitate the membrane using thermal energy. The membrane is ca. 700 nm thick
and with size of 1mm x1 mm. Who can tell me how much energy has to supplied
to the membrane?

Thanks

Yanli Wang

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