I am seeking information concerning the conversion of a Tegal 701 plasma etcher, from a plasma etch configuration, to a reactive ion etch configuration. In particular, I'm looking for the names of those skilled in making this kind of etch conversion. Please contact me at one of the addresses below. Best regards, Al Henning -- Albert K. Henning, Ph.D. 650/617-0854 (Office) Redwood Microsystems 650/326-9217 (FAX) 1020 Hamilton Avenue henning@redwoodmicro.com Menlo Park, CA 94025 http://www.redwoodmicro.com