durusmail: mems-talk: Wanted: RIE conversion of Tegal 701
Wanted: RIE conversion of Tegal 701
Wanted: RIE conversion of Tegal 701
Albert K. Henning
1998-05-06
I am seeking information concerning the conversion of a Tegal 701 plasma
etcher, from a plasma etch configuration, to a reactive ion etch
configuration.  In particular, I'm looking for the names of those
skilled in making this kind of etch conversion.  Please contact me at
one of the addresses below.

Best regards, Al Henning
--
Albert K. Henning, Ph.D.    650/617-0854 (Office)
Redwood Microsystems        650/326-9217 (FAX)
1020 Hamilton Avenue        henning@redwoodmicro.com
Menlo Park, CA  94025       http://www.redwoodmicro.com


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