I have e-beam evaporated many different metals--including
molybdenum--with
no degradation of S1813 resist.  Gold is one of the easier (lower
temperature) metals.

-----Original Message-----
From: Sven Passinger
Sent: Thursday, August 11, 2005 11:01 AM
To: 'General MEMS discussion'
Subject: AW: [mems-talk] Lift-Off-Process question

I can clearly see the undercut in the SEM pictures and structures of
below 500nm as I want.

The question I have to evaporating: you need high temperatures for this.
Is this no problem for the resist? I think the S1800 series begins to
flow above 100°C. As far as I know eveparoting of gold means much
higher temperatures.