Dear all,
  We have a MJB4 - 4'' Manual Mask Aligner in our cleanroom which we use
frequently. Recently its lamp gets old and sometimes come off. It needs
changing but when we tried to contact the commercial company SUSS, who made
the mask aligner, they didn't give much information on how we can get a new
UV lamp and replace the old one. Also, we were planning to buy a deep UV
lamp that can expose PMMA. Does anyone know any commerical provider of UV
and deep UV lamps? And what is the normal approach of replacing UV lamp?
Thanks a lot.
  cheers
  Jiang Ziling