Hi polly, BHF:glycerol 2:1 etches aluminium with a selectivity of 0.006 towards thermal SiO2, HF vapor phase etching etches aluminium with selectivity of 0.002. Check out the publications and application on idonus.com. Best, Michael -----Original Message----- From: polly Sent: Donnerstag, 6. Oktober 2005 13:54 To: mems-talk@memsnet.org Subject: [mems-talk] how to etch SiO2 without etching underlying Aluminum I would like to know what are the etchants for etching SiO2 without etching underlying ALuminum