durusmail: mems-talk: Strange Effects in SU 8 2100..
Strange Effects in SU 8 2100..
Strange Effects in SU 8 2100..
riyaz pasha shaik
2005-10-07
Hai Every one,

           I am using a plastic syringe for depositing SU8 2100 resist
onto the wafer.. After the syringe is empty can I once again reuse the
syringe to refill SU 8 resist..?

The syringe has a rubber material where the residue's of SU 8 remained.
To clean this I have taken some SU 8 developer into syringe and kept in a
standing position so that the rubber material is rinsed with developer,
for a night (No need for such a long time but to check whether the rubber
material is affected with developer or not, But I havent found any changes
in the material)

After that I cleaned the syringe by rinsing with acetone and Iso proponal
and also with DI water.

I continued the same procedure for filling the resist into the syringe as
before.

I found very strange effects when I use the resist for my experiments..

Such as under exposure at one part of the wafer..

Does any one have any idea whether can we re-use the used syringe..?

Thanks for a reply to my post in advance

Regards,

Riyaz Pasha Shaik

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