I had the exact same problem 3-4 years ago. I found that GBL and = Cyclopentanone is not compatible with a rubber syringe.=20 I solved the problem by using a PP or PE syringe without the rubber. It = can be reused, but you must be careful not to let particulates from = dried SU-8 get into the syringe. =20 Jacques Jonsmann ________________________________ Fra: mems-talk-bounces@memsnet.org p=E5 vegne af riyaz pasha shaik Sendt: fr 07-10-2005 15:59 Til: mems-talk@memsnet.org Emne: [mems-talk] Strange Effects in SU 8 2100.. Hai Every one, I am using a plastic syringe for depositing SU8 2100 resist onto the wafer.. After the syringe is empty can I once again reuse the syringe to refill SU 8 resist..? The syringe has a rubber material where the residue's of SU 8 remained. To clean this I have taken some SU 8 developer into syringe and kept in = a standing position so that the rubber material is rinsed with developer, for a night (No need for such a long time but to check whether the = rubber material is affected with developer or not, But I havent found any = changes in the material) After that I cleaned the syringe by rinsing with acetone and Iso = proponal and also with DI water. I continued the same procedure for filling the resist into the syringe = as before. I found very strange effects when I use the resist for my experiments.. Such as under exposure at one part of the wafer.. Does any one have any idea whether can we re-use the used syringe..? Thanks for a reply to my post in advance Regards, Riyaz Pasha Shaik