Jitendra and Sonia, The cracking issue with all SU-8 resists is linked to the cross-link density and the effect of the developing solvent....This can be overcome by optimising the exposure dose for your particular process and the substrate you are going over...It is well known that exposures on Copper can require up to 2X the exposure dose for Silicon...I would recommend using an exposure matrix to get the correct dose... If after all of the optimisation work has beed completed the cracks are still evident just perform a post develop bake/hard bake/ cure at 150C for 1-3 minutes and all of the cracks will disappear or anneal away... As a note all SU-8/SU-8 2000 users a revised data sheet and updated processing guidelines will be published soon....The data contained in the new sheets is up to date and contains much more processing information for these type of issues....For specific processing problems please contact Mark Shaw at MicroChem.... Mark Shaw Sales and Technical Support Manager Epoxy Business Unit MicroChem Corp. Email: mshaw@microchem.com Tel: 617-407-9490 (cell) Tel: 617-965-5511 ext 308 (desk) 1. RE: SU-8 2050 Cracking (GARCIA BLANCO Sonia) ---------------------------------------------------------------------- Message: 1 Date: Fri, 21 Oct 2005 13:10:34 -0400 From: GARCIA BLANCO SoniaSubject: RE: [mems-talk] SU-8 2050 Cracking To: 'General MEMS discussion' Message-ID: <12EDAD956333D8118C830007E9086704042159A4@mozart.ino.ca> Content-Type: text/plain; charset="iso-8859-1" Hi Patel, I had the same problem with another thick resist. In my case I was overexposing the resist and that is why it was cracking. Hope this helps! Sonia. -----Message d'origine----- De : PATEL JITENDRA [mailto:jpatel@ENGR.UARK.EDU] Envoyé : Thursday, October 20, 2005 5:05 PM À : mems-talk@memsnet.org Objet : [mems-talk] SU-8 2050 Cracking I am working with SU-8, 2050, photoresist. I am trying to create 30 micron diameter vias using SU-8 for copper posts. After expose and develop I notice that I see cracks around the edge of the vias. Has anyone come accross this problem? if so, what was the solution. Thanks for your help. Jitendra Patel p.s. I am following the processing step as recommend by MicroChem. This is my process Clean wafer, Baked, Sputter Ti/Cu/Ti, apply omnicoat, baked, apply SU-8 2050, soft bake, expose using 365nm UV light source, Post expose bake, let it sit overnight, Develop SU-8 using SU-8 developer, Develop omnicoat using de- scum.