durusmail: mems-talk: HD-8820 Polyimide
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2005-11-07
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2005-11-07
HD-8820 Polyimide
Giuliano Gregori
2005-11-07
Hi all,
I'd like to use polyimide as sacrificial layer for the fabrication of an
air-bridge.
I'll have to spin it on a SiO2 surface; on part of the top I'll have to
deposit gold and SiO2 again.
I was thinking to use HD-8820 polyimide and I wonder whether this is a
good solution.
Has anybody already used something similar ?   Suggestions ???

Thanks in advance !
Giuliano
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