durusmail: mems-talk: PDMS photoresist recipe
PDMS photoresist recipe
PDMS photoresist recipe
jgrogan@seas.upenn.edu
2005-11-14
Hi Sokwon,

I got photodefinable PDMS from Dow a couple months ago and they provided me
with the processing instructions. I suggest you just contact the manufacturer
of your PDMS photoresist and they should be able to give you the appropriate
instructions.

good luck,
Joe Grogan


Quoting sokwon Paik :

> Hi!
>
> Does anybody know the recipe for the PDMS for photoresist?
>
> I want to coat around 2 micro meter and then do the UV exposure.
>
> Please reply me if you know anything about this.
>
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