durusmail: mems-talk: Selective, clean PDMS etch
Selective, clean PDMS etch
Selective, clean PDMS etch
xiangyu100@gmail.com
2006-01-20
Hi, Rick,
I saw your post on mems-talk. have you been able to find a good receipe for
RIE over PDMS? If so, do you mind sharing your success stories? Thanks. I am
trying to etch pdms too, but need some help.
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Best Regards,
Yu Xiang
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