Liang, generally you need to increase your exhaust and make sure that it is
uniform peripherally.  Gary

Gary Hillman
Service Support Specialties, Inc.
9 Mars Court
PO Box 365
Montville, NJ 07045
973-263-0640
973-263-8888.



hi,everyone

I tried to spin the lift off resist LOR15A on a 40mm
square wafer, but many many residues like hair
appeared out of the wafer edge even at the high speed
of 6000rpm.
Who can give me any advice?

Thank you in advance.