I don't think you can get a uniform coating. The trench will get at least partially filled in, if you are spinning on a thin layer of resist. If you are spinning on a thick layer of resist it will get completely filled in. Robert -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Kamesh Sent: Monday, January 30, 2006 11:09 AM To: mems-talk@memsnet.org Subject: [mems-talk] Photoresist Step coverage and conformality Dear All, I am a brand new member of Mems Exchange. It is really very nice to have such a community to seek microprocessing advise. My question : 1. I have a trench that it 3 microns deep and 30 microns wide. Can a uniform coating of this trench be obtained by spin coating standard photoresist ? What is the highest aspect ratio feature that can be uniformly coated with standard photoresist ? 2. Is it possible to reliably fill an isolation trench that is 3 microns deep and 30 microns wide with CVD grown SiO2 ? Thank you very much for the help !