Rakesh What type of nitride (SiN or TiN or TaN or AlN etc) do you want to deposit on Al or Cr layers? Rakesh Poddarwrote: Hi, I want to electrically insulate my metal patterns (Al, Cr) by depositing a nitride layer...Is it possible to deposit LPCVD or PECVD nitride on the metal layer particuarly Al and Cr.. If anybody has prior experience on this kind of process, please comment...