durusmail: mems-talk: diffusion barrier for copper-polyimide
diffusion barrier for copper-polyimide
2006-02-10
PVDF vendor
2006-02-10
decrease total thickness variation
2006-02-12
2006-02-13
2006-02-17
diffusion barrier for copper-polyimide
Michael D Martin
2006-02-10
Erikin,
   You might try using the polyimide adhesion promoter, VM-651 which I
think will stick to metal oxides.

-Michael
  U. of Louisville

>>> erkin@virginia.edu 02/10/06 1:39 PM >>>
Hi,

I am trying to make micro strain gauges using the following method in
summary:

- Spin 250nm-thick polyimide diluted with NMP; completely cure at 325C
- Sputter/pattern 80nm-thick Cu/Ni on cured polyimide
- Spin 250nm-thick polyimide diluted with NMP; completely cure at 325C

The problem I am having is that after the cure, the polyimide above
Cu/Ni
layer is disappearing.  I read about copper oxide diffusion into
polyimide
due to the reaction between copper and polyamic acid; but I am not sure
if
this explains the material loss over the metal lines.

I already tried amino silane adhesion promoters provided by GE Silicone,
but
didn't have any success.

I would be grateful if somebody could suggest a solution.
reply