Hi, I want to have some Ebeam defined patterns of small angle slopes
(<30 degrees), contrary to the general vertical side walls , in either
silicon or quartz wafers. I noticed that in anisotropic wet etching of
silicon, by aligning the crystal planes about 50 degrees pyramids could
be formed. I'm wondering whether it is possible to achieve even smaller
angles. Any information would be highly appreicated. Thanks a lot.
Best,
Long