Actually I don't know the answer to you question, and I am very interested
in it too.

But something I'd like to add is, since you are simulating micromirrors and
capacitive sensors, you might also want to take squeeze film effect into
account. Especially when your device is close to the substrate (small gap
distance), and operating at high frequencies.

Yet as I said I am not expert, so feel free to correct me. And, if there is
any news, please keep me informed too!

ck

----- Original Message -----
From: "Terry Zhu" 
To: 
Sent: Sunday, April 09, 2006 8:17 PM
Subject: [mems-talk] Ambient dambing effect


> I am doing some simulation using ANSYS for torsional micromirror and
capacitive sensors. I have seen big discrepancy in actual operation
frequency/speed with the simulated ones without taking damping into account.
Any one can help in how the ambient damping would be Incorporated into the
simulation and what the value it should be, Or any one can provide
information about this. Thanks.
>