Hi all,

       I am looking for a right tool to measure the stress in the polymer
thin film(~50nm) at wafer level. The polymer is a fluorocarbon which is like
Teflon. The film is deposited with the ICP. I had gone through long range
surface profiler. But is there any other spectroscopic technique that can be
used for wafer level stress measurement?

Thanks in advance,

Arun