durusmail: mems-talk: DC Sputtering of Chromium and Platinum
DC Sputtering of Chromium and Platinum
2006-07-04
DC Sputtering of Chromium and Platinum
Rupesh Sawant
2006-07-04
I want to do DC sputtering of Chromium (as an adhesive layer) and
platinum (as an electrode layer on soda lime glass. Do i need to do
any surface treatment of glass apart from cleaning? Can someone tell
me the deposition rate of platinum if argon gas is used in sputtering
and what is the pressure of Argon required for that.

it would be very helpful if someone suggest me a reference paper for
DC sputtering of metal on glass.
--
RUPESH SAWANT
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