Hi Angelo,

I only know about dry etching by CF4/O2 or SF6/O2 plasma or laser ablation of PI
sheets. With both methods 60 µm holes can be realized.

Best,

Michael Zickar

--------------------------------------------
Institute of Microtechnology
University of Neuchatel
Jaquet-Droz 1
2000 Neuchatel
Switzerland

Tel.: +41 32 720 5525
Fax:  +41 32 720 5711

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On
Behalf Of Angelo Gobbi
Sent: Mittwoch, 12. Juli 2006 18:59
To: mems-talk@memsnet.org
Subject: [mems-talk] Kapton wet etching

Hi,

Does anybody know how to wet etching Kapton?
I want to make 60um diameter hole in a 50um thick kapton foil.

Can any one suggest some etchant/methods?

Many thanks!